EWU and EWL for Robot loader/unloader
1
2
機能・特性
- Wafer Size Self-diagnosis function and auto conversion system
- Wafer cassette loading: 1 wafer cassette
- Able to use two size wafer:6
- Conforms to SMEMA Spec.12
製品情報
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MANUFACTURER
EUN-IL -
MANUFACTURING PROCESS
WLCSP -
Details
Robot loader/unloader
